X-Section / Circuit Repair
Spirox IC Verification Center uses FIB to remove or deposit materials to find circuit bugs or process-related issues at its ISO 9001:2000 certified Physical Lab. Spirox engineers utilize a high accurate OptiFIB for process of 90nm and beyond with a high success rate of circuit repairing.

  • FEI201 with GDS interface and W-Gas, Pt-Gas, I2-Gas and XeF2
  • SMI2050 with GDS interface and C, W-Gas, XeF2, E-Gas and New T-Gas
  • OptiFIB with GDS interface and various gases for copper, low-k dielectric, SOI, front- and back-side circuit repairing
  • ISO 9001:2000 and IECQ certification
  • NEXS CAD navigation



  

Physical Lab
Electrical Lab
Chemical Lab
Reliability Lab

IC Verification Center:
Geoffrey_Lin@spirox.com.tw
Tel. +886-3-6669700
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