• Completed recipe data base
• High performance and yield
• Device process measurement
  
  

Defect and Surface Structure Analysis
Spirox Chemical Lab uses high-resolution Field Emission-Scanning Electron Microscopes (FE SEM) to conduct surface structure analysis. The completely automated electron optics can observe fine structures such as multi-layered film and nano particles fabricated by nano technology.

Features:

• Large eccentric specimen stage with motorize control
• Compatible with network
• ISO 9001:2000 & IECQ certification
  
  

Qualitative Analysis
Spirox Chemical Lab uses Energy Dispersive Spectroscopy (EDS) to produce a stable probe current for qualitative, quantitative, and element map analysis.

Features:

• Current fluctuation monitor
• Automated compensation of probe current fluctuation