Dynamic Timing Analysis
Credence Emiscope

Dynamic time resolved emission microscopes enable picoseconds resolution and high bandwidth timing measurement. The EmiScope is a completely non-invasive IC diagnostic platform for design debug and failure analysis. It can measure logical switching activity and timing information with picoseconds accuracy from virtually any active transistor in both flip-chip and wirebond devices. EmiScopes are used around the world to solve the most challenging circuit problems on leading-edge technology.


  • Non-invasive back-side signal probing
  • 10 picoseconds accuracy
  • High resolution Solid Immersion Lens
  • Nexs CAD navigation
  • Dynamic delay timing analysis

Available: Taiwan






Emission Microscope

Credence EFA for EMMI

Credence EFA for EMMI products provide failure analysis and yield enhancement engineers unprecedented visibility to very faint emission signals and dynamic/static laser scanning at the node level. A high sensitivity optical diagnostic platform for front- or back-side (through the substrate) design debug and failure analysis provides extremely high signal to noise ratios and exceptional spatial resolution to detect abnormal emission conditions. With its highly sensitive detectors, high numerical aperture (NA) IR optics design, and advanced fault localization software capabilities, the Credence EFA for EMMI dramatically eases the difficult and time-consuming process of global fault localization.


  • High SNR CCD/MCT/InGaAs detectors
  • High resolution Solid Immersion Lens
  • Dynamic/Static Laser Scanning Microscopy
  • Front and back-side detection capabilities
  • 200mm and 300mm prober option
  • Multi-Spectral Analyzer
  • NEXS CAD navigation software

Available: Taiwan






Front & Back-Side Circuit Editing

Credence OptiFIB

OptiFIB is the first and only focused ion beam (FIB) instrument to combine photon and ion optics in a coaxial column, providing real-time imaging for navigation and unmatched milling accuracy for front- and backside circuit editing. The remarkable coaxial column and photon optics enable you to see through silicon, to accurately align the FIB and CAD images and simultaneously drill with unparalleled precision.


  • Copper etching chemical
  • Low resistance metal deposition
  • Low-k dielectric protection
  • LIS stage with piezo motor for accurate navigation
  • Coaxial optical gun for navigation
  • Front & Back-Side Circuit Editing

Available: Taiwan






Laser scanning

Credence GlobalScan

Credence GlobalScan is a laser scanning microscope (LSM) that pinpoints complex design and process issues. It can be configured for both dynamic and static applications. In dynamic mode, GlobalScan can highlight which parts of a circuit are causing thermal, speed, voltage, or other performance marginalities. In static mode, GlobalScan can find the source of failures often missed by ATPG methodologies. Dual lasers built into the system enable wide failure coverage, from resistive vias to electromigration.


  • 1340nm laser for TIVA, OBIRCH
  • 1064nm laser for LIVA, OBICH
  • Dynamic mode for LADA and SDL
  • NEXS CAD navigation
  • High resolution Solid Immersion Lens

Available: Taiwan





 

Dynamic Timing Analysis
Emission Microscope
Front & Backside Circuit Editing
Laser Scanning


Taiwan Contact:
Laura_Kao@spirox.com.tw
Tel. +886-3-5738099 ext. 2019