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 Exhaust Controller Brooks Automation SENTRY 1000 Brooks Automation offers dynamic control of clean room exhaust fluctuations. The Automated SENTRY 1000 establishes complete electronic control over the process set point. This unique package provides for instituting multiple set points, coupled with constant monitoring of the user’s process pressure. 
Single Wafer Thermal CVD System Eugene BlueJay M1000 Bluejay M1000 is a single wafer LPCVD cluster tool for nitride application and was designed based upon the field proven and reliable Bluejay M100 series. Bluejay M1000 has been used in the production line of leading semiconductor fabs for submicron technologies and is compatible with 90nm and 65nm device for 300 mm wafer.
RTP system KORMIC SYSTEMS developed the RTP (Rapid Thermal Process system) had succeed to penetrate Korea Samsung with 8” and 12” production line, also enlarge the market to China, Taiwan, Singapore and Germany. The product lines covered 2” to 12” , manual/semi-auto to full automation. In the meantime, KORNIC SYSTEMS had owns the advanced technology with Low-temperature control and Spike anneal process.
GLTP system KORMIC SYSTEMS developed the GLTP (Green Laser Thermal Processing) for the Semiconductor advanced technology as the UJS (Ultra Shallow Junction process), it owns high reliability and full automatic laser system, and also provide the high accuracy wafer stage to improve advanced Nano-meter process technology.
LLO system KORMIC SYSTEMS developed LLO (Laser Lift Off system) with full automatic and high reliability Laser unit, integrated with high accuracy wafer stage, to perform the lift off the sapphire substrate from the GaN film. This process would be used for the high brightness LED process.
GDD system KORMIC SYSTEMS provide the GDD (Growing Defect Detector system) would be used for the High-end photo mask (below 90nm) yield improvement. The system would speed up to generate the haze on the surface of photo mask through the high energy and stable good uniform laser beam. And then through defect inspection system to determine the haze on mask, and then we can tuning the processing condition for improve the manufacture yield.
Rotors / Refurbished Spin Rinse Dryers
Dry Vacuum Pumps Kashiyama SDE / HC / KMB / SD Series KASHIYAMA's products have earned the confidence of our customers in advanced technology industries, especially semiconductor manufacturers. This series of Kashiyama dry vacuum pumps, which have become standard equipment in semiconductor manufacturing, are the best in vacuum technology. Their proven reliability has been highly praised by many customers.
Plasma Systems are widely used in Industrial / Medical Industries, which includes the Medical Diagnostics, Medical Devices, Optics, Electronics and Optical Disk Mastering.
The PlasmaPen™ is an Atmospheric Plasma System. This device generates a genuine, non-filamentary plasma under atmospheric conditions, at temperatures low enough to safely treat low melting point polymers. The PlasmaPen™ is ideal for inline applications such as the treatment of fibers and spooled wire, or for on-board applications where it can be mounted to dispensing equipment or wirebonders for in-situ surface treatment. Of particular note, the plasma plume emitted from the nozzle does not contain any voltage or current, making this product ideal for treating electronic devices.
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Exhaust Controller
Sharon_Chen@spirox.com.tw Tel. +886 3 5738099 ext. 5019 China Contact: Singapore Contact:
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