Chemical Mechanical Polisher
Accretech ChaMP

Combining the technological expertise built up by Accretech in precision measuring equipment and semiconductor manufacturing equipment, the “ChaMP Series” of CMP systems are compatible with 300mm wafers, with process performance required by design rules for 90nm and 65nm devices to keep up with the most advanced volume-production fabs. 


  • Unique head "Sylphide" can achieve high uniformity, low damage, better edge profile control 
  • White light EPD (End Point Detector) can achieve accurate remaining film thickness control 
  • High throughput to achieve high productivity 
  • Easy head maintenance to lower the time and cost of system main

Available: Taiwan, China






Exhaust Controller
Brooks Automation SENTRY 1000
Brooks Automation offers dynamic control of clean room exhaust fluctuations. The Automated SENTRY 1000 establishes complete electronic control over the process set point. This unique package provides for instituting multiple set points, coupled with constant monitoring of the user’s process pressure. 


  • Superior solutions to point-of-use exhaust control challenges for semi-conductor process tools.
  • Designed for either mass flow or static pressure (vacuum) process control, this technology prevents fluctuations from the house exhaust system from affecting the process 

Available: Taiwan





Single Wafer Thermal CVD System
Eugene BlueJay M1000
Bluejay M1000 is a single wafer LPCVD cluster tool for nitride application and was designed based upon the field proven and reliable Bluejay M100 series. Bluejay M1000 has been used in the production line of leading semiconductor fabs for submicron technologies and is compatible with 90nm and 65nm device for 300 mm wafer. 


  • Independent dual zone temperature control excellent thickness uniformity 
  • Below 730°C process within 4 min. process lower thermal budget than furnace 
  • CFD model based gas distribution design lower particle generation 
  • Wide process range applicable different layer 

Available: Taiwan, Singapore




 

Rotors / Refurbished Spin Rinse Dryers
C&J Engineering / Sitek Refurbished Semitool 870, 880, 4300
For the design and manufacture of replacement rotors for spin rinse dryers.


Available: Singapore





Dry Vacuum Pumps
Kashiyama SDE / HC / KMB / SD Series

KASHIYAMA's products have earned the confidence of our customers in advanced technology industries, especially semiconductor manufacturers. This series of Kashiyama dry vacuum pumps, which have become standard equipment in semiconductor manufacturing, are the best in vacuum technology. Their proven reliability has been highly praised by many customers.  


Available: Singapore




 

 

Chemical Mechanical Polisher
Exhaust Controller
Single Wafer Thermal CVD System
Rotors / Refurbished Spin Rinse Dryers
Dry Vacuum Pumps
Taiwan Contact:
Sandy_Lai@spirox.com.tw
Tel. +886 3 5738099 ext. 5019

China Contact:
Jessica_Chew@spirox.com.tw
Tel. +86 21 6108-1858

Singapore Contact:
Seowying@spirox.com.sg
Tel. +65 6542 5488