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 Chemical Mechanical Polisher Accretech ChaMP Combining the technological expertise built up by Accretech in precision measuring equipment and semiconductor manufacturing equipment, the “ChaMP Series” of CMP systems are compatible with 300mm wafers, with process performance required by design rules for 90nm and 65nm devices to keep up with the most advanced volume-production fabs. 
Exhaust Controller Brooks Automation SENTRY 1000 Brooks Automation offers dynamic control of clean room exhaust fluctuations. The Automated SENTRY 1000 establishes complete electronic control over the process set point. This unique package provides for instituting multiple set points, coupled with constant monitoring of the user’s process pressure.
Single Wafer Thermal CVD System Eugene BlueJay M1000 Bluejay M1000 is a single wafer LPCVD cluster tool for nitride application and was designed based upon the field proven and reliable Bluejay M100 series. Bluejay M1000 has been used in the production line of leading semiconductor fabs for submicron technologies and is compatible with 90nm and 65nm device for 300 mm wafer.
Rotors / Refurbished Spin Rinse Dryers C&J Engineering / Sitek Refurbished Semitool 870, 880, 4300 For the design and manufacture of replacement rotors for spin rinse dryers.
Dry Vacuum Pumps Kashiyama SDE / HC / KMB / SD Series KASHIYAMA's products have earned the confidence of our customers in advanced technology industries, especially semiconductor manufacturers. This series of Kashiyama dry vacuum pumps, which have become standard equipment in semiconductor manufacturing, are the best in vacuum technology. Their proven reliability has been highly praised by many customers.
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Exhaust Controller Single Wafer Thermal CVD System Rotors / Refurbished Spin Rinse Dryers Dry Vacuum Pumps 
Sandy_Lai@spirox.com.tw Tel. +886 3 5738099 ext. 5019 China Contact: Singapore Contact:
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