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 CD Measurement System Hitachi ZA-H200 This system automatically measures line width and overlay accuracy of various patterns produced with not only metal but also transparent layer of ITO, Si and etc. during manufacture of LCD glass. This system is a comparative measurement system that is calibrated with standard scale. 
Wide Area AFM Hitachi WA1300 The wide area AFM is capable of measuring super wide area contour, such as observation 1 shot of stepper, to angstrom area. Scanning area from small area (100nm square) to large area (25.6mm square). Possible to observe a cross section without breaking a wafer. Observation of µlens for CCD (CMOS Image Sensor)
Wafer Thickness Measurement System Futo FT300 / FT3031 Capable of measuring 4" to 12" wafers, the FT300 model can hold 4", 5", 6", 8" and 12" wafers on the chuck table. It is made with conductive SUS mirror finish, damage free.
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Wide Area AFM Wafer Thickness Measurement System 
Sandy_Lai@spirox.com.tw Tel. +886-3-5738099 ext. 5019 China Contact: Singapore Contact:
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