CD Measurement System
Hitachi ZA-H200

This system automatically measures line width and overlay accuracy of various patterns produced with not only metal but also transparent layer of ITO, Si and etc. during manufacture of LCD glass. This system is a comparative measurement system that is calibrated with standard scale.


  • Versatile measurement functions and excellent accuracy 
  • Excellent measurement repeatability  

Available: Taiwan, China






Wide Area AFM
Hitachi WA1300

The wide area AFM is capable of measuring super wide area contour, such as observation 1 shot of stepper, to angstrom area. Scanning area from small area (100nm square) to large area (25.6mm square). Possible to observe a cross section without breaking a wafer. Observation of µlens for CCD (CMOS Image Sensor)


  • Data acquisition speed of 1mm/s at the wide mode.
  • Observation of large step difference, which used to be impossible by conventional AFM.
  • High precision measurement with the Built-in displacement meter. 

Available: Taiwan





Wafer Thickness Measurement System
Futo FT300 / FT3031
Capable of measuring 4" to 12" wafers, the FT300 model can hold 4", 5", 6", 8" and 12" wafers on the chuck table. It is made with conductive SUS mirror finish, damage free.

Available: Singapore



 

CD Measurement System
Wide Area AFM
Wafer Thickness Measurement System


Taiwan Contact:
Sandy_Lai@spirox.com.tw
Tel. +886-3-5738099 ext. 5019

China Contact:
Jessica_Chew@spirox.com.tw
Tel. +86 21 6108-1858

Singapore Contact:
seowying@spirox.com.sg
Tel. +65 6542 5488