CD Measurement System
Hitachi ZA-H200

This system automatically measures line width and overlay accuracy of various patterns produced with not only metal but also transparent layer of ITO, Si and etc. during manufacture of LCD glass. This system is a comparative measurement system that is calibrated with standard scale.


  • Versatile measurement functions and excellent accuracy 
  • Excellent measurement repeatability  

Available: Taiwan, China





Wafer Thickness Measurement System
Futo FT300 / FT3031
Capable of measuring 4" to 12" wafers, the FT300 model can hold 4", 5", 6", 8" and 12" wafers on the chuck table. It is made with conductive SUS mirror finish, damage free.

Available: Singapore



 

CD Measurement System
Wafer Thickness Measurement System


Taiwan Contact:
Sharon_Chen@spirox.com.tw
Tel. +886-3-5738099 ext. 2912

China Contact:
Ivy_Xiao@spirox.com.tw
Tel. +86-21-6108-1858 ext.3009

新加坡:
seowying@spirox.com.sg
Tel. +65 6542 5488