Spirox FAB equipment systems facilitate efficient inspection, measurement and process controls for semiconductor manufacturing.


Make a selection from the table below:

Inspection Metrology
Bright Field Wafer Inspection System
Deep UV Wafer Inspection System
Defect Review SEM System
Electron Beam Wafer Inspection System

CD Measurement System
Wide Area AFM
C-V / I-V Measurement System
Wafer Thickness Measurement System
Process Tool
Chemical Mechanical Polisher
Exhaust Controller
Single Wafer Thermal CVD System
Rotors / Refurbished Spin Rinse Dryers
Dry Vacuum Pumps

 

  

 
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