Spirox FAB equipment systems facilitate efficient inspection, measurement and process controls for semiconductor manufacturing.


Make a selection from the table below:

Inspection Metrology
Defect Review SEM System
Dark Field Wafer Defect
Inspection System
Unpatterned Wafer Surface
Inspection System

CD Measurement System
 C-V / I-V Measurement System
Wafer Thickness Measurement System
Process Tool
Exhaust Controller
Single Wafer Thermal CVD System
RTP system
GLTP system
LLO system
GDD system
Rotors / Refurbished Spin Rinse Dryers
Dry Vacuum Pumps
RF Gas Plasma System
 PlasmaPen™ System

 

  

 
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