Spirox FAB equipment systems facilitate efficient inspection, measurement and process controls for semiconductor manufacturing.


Make a selection from the table below:

Inspection Metrology
Bright Field Wafer Inspection System
Deep UV Wafer Inspection System
Defect Review SEM System
Electron Beam Wafer Inspection System

CD Measurement System
Wide Area AFM
C-V / I-V Measurement System
Wafer Thickness Measurement System

Process Tool
Chemical Mechanical Polisher
Exhaust Controller
Single Wafer Thermal CVD System
Rotors / Refurbished Spin Rinse Dryers
Dry Vacuum Pumps