Automatic Optical Inspection (AOI)

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【Spirox】Macro Inspection System

【Spirox】Macro Inspection System

Spirox MA6500 is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace IQC visual inspection on surface defects, including particles, scratches, etc.

 

【Features】

  • 65 mega pixel camera with high FOV and high recognizability
  • Use RGB particular algorithm to process color information and increase defect characteristics inspection
  • 10μm Defects Inspection Items: Particles, Scratches, Pad Defects, Bump Defects
  • Auto wafer-level chuck with ±1.7μm accuracy to process high accuracy wafer coordinate alignment
  • Zoning parameter setting to realize accurate inspection requirement by zones
 

【Inspection Process】

 

【Defect Inspection Application】

 

【Specification】

MA6500 Specification
Function
  • Replace IQC visual inspection on surface defects (Including particles, scratches, etc.)
  • Auto-storing wafer surface defects image and position coordinate records
Wafer
  • Compatible with 8-inch and 12-inch Wafer
  • Wafer Thickness:300μm ~ 2000μm
Wafer Handling
  • Support automatic opening function for 12-inch FOUP cassette
  • Wafer ID Scan
  • Pre-aligner (Notch Location)
Optical
  • Camera: 65 Mega Pixel and Telecentric Lens
  • FOV: 29mm x 22mm
Chuck
  • Support wafer leveling function
  • Stage Flatness < 15μm
  • X/Y Axis Accuracy: ±1.7μm
  • Wafer Alignment
Image
Auto-Inspection
  • Defect Size: > 10um
  • Discoloration Inspection
  • Scratches Inspection
  • Contamination Inspection
  • Process Defects Inspection
Software
  • Compatible with Wafer ID OCR
  • Output Format: .bmp or .jpg
  • Online Review System
  • Storing Operation Logs
Inspection Time
  • 90 seconds / 8-inch Wafer
  • 150 seconds / 12-inch Wafer
  * Exclusive of photo shooting and equipment loading / unloading time
Options
  • Offline Review System
  • Customized Report