Non-Distructive Defect Inspection

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WBG-Stress Analysis

WBG-Stress Analysis

JADEMAT-WBG-SA

  • Principle: Using a 532nm wavelength laser, the result of stress is obtained by obtaining the gap between atoms inside the object.
  • Uses: Stress detection of SiC substrates and compound semiconductor related substrates, so that defects within a depth of 360 microns in a 5cm*5cm area can be detected, and three-dimensional and deep patterns can be generated.
  • Advantage: For the current situation where the existing machine cannot detect the tension and pressure inside the material, it may cause defects in the subsequent process. The advantage of JADEMAT-WBG-SA compared to the X-ray XRT pattern is that it can confirm the type of stress and the existence of defects Therefore, the occurrence of defects and the causes of sub-defects can be prevented in advance.
  • Application: R&D and testing of compound semiconductor materials such as SiC substrates, SiC epitaxy and GaN epitaxy

Southport Co. was established in August 2014. The founding team gathered talents from cross fields such as optics, materials, physics, and information, introducing novel optical design concepts in optical engineering.Based on the two core technologies of 5D microscopy and digital optics, Southport has introduced brand-new optics concepts and technologies into four key application areas: advanced material analysis, biomedical imaging, microstructure and transparent material inspection, and digital optics. Southport is committed to focusing on solving critical problems for R&D, relieving the pains in practices for facilitating innovation. Through integrating the knowledge of light, mechanics, electronics, and software, incorporated with modular and digital design genes, and further combined with our knowledge and experiences, Southport is ready to provide the cutting-edge optical tools needed by academia and industry.

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