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WBG-3D Analysis for Defect and Depth of Defect

WBG-3D Analysis for Defect and Depth of Defect


  • Principle: Using the principle of nonlinear optics, laser (infrared light) penetrates the material to receive and measure the reflected visible light signal, so that the internal situation of a specific depth can be obtained to achieve the purpose of internal detection (limited to materials with semi-transparent characteristics, too thick Metal cannot be measured)
  • Uses: In the case of non-destructive samples, 3D analysis can be performed for the Micro pipe, BPD and defects below the lattice surface of the SiC substrate, and the results of laser hidden cutting can be detected.
  • Advantages: Internal defects can be found early, reducing costs and causing component failures, and can analyze the distribution of Micro Pipes on the YZ axis.
  • Application: SiC substrate and epitaxial manufacturing; SiC components; GaN components

Southport Co. was established in August 2014. The founding team gathered talents from cross fields such as optics, materials, physics, and information, introducing novel optical design concepts in optical engineering.Based on the two core technologies of 5D microscopy and digital optics, Southport has introduced brand-new optics concepts and technologies into four key application areas: advanced material analysis, biomedical imaging, microstructure and transparent material inspection, and digital optics. Southport is committed to focusing on solving critical problems for R&D, relieving the pains in practices for facilitating innovation. Through integrating the knowledge of light, mechanics, electronics, and software, incorporated with modular and digital design genes, and further combined with our knowledge and experiences, Southport is ready to provide the cutting-edge optical tools needed by academia and industry.