The PHEMOS-1000 is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by semiconductor device defects. Since the PHEMOS-1000 is usable in combination with a general-purpose prober, you can do various analysis tasks by using the sample setups you are already familiar with. Installing an optional laser scan system allows acquiring high-resolution pattern images. Different types of detectors are available for various analysis techniques such as emission analysis, thermal analysis, and IR-OBIRCH analysis. The PHEMOS-1000 supports a wide variety of tasks and applications ranging from prober socket boards to a large-size 300 mm wafer prober.
The PHEMOS-1000 superimposes the emission image on a high-resolution pattern image to localize defect points quickly. The contrast enhancement function makes an image clearer and more detailed.
Display function
| Dimensions/Weights | Main unit: 1340 mm (W)×1200 mm (D)×2110 mm (H), Approx. 1500 kg Control rack: 880 mm (W)×820 mm (D)×1542 mm (H), Approx. 150 kg Operation desk: 1000 mm (W)×800 mm (D)×700 mm (H), Approx. 45 kg |
|---|---|
| Line voltage | AC200 V (50 Hz/60 Hz) |
| Power consumption | Approx. 1400 VA (Max. 3300 VA) |
| Vacuum | Approx. 80 kPa or more |
| Compressed air | 0.5 MPa to 0.7 MPa |
* Weight of PHEMOS-1000 main unit includes a prober or equivalent item.
日本滨松光子学株式会社（HAMAMATSU）是全球光子技术、EFA领域的领导企业。自1953年成立以来，EFA失效分析产品销往全球半导体各大企业，拥有数量最多的半导体和面板行业客户。HAMAMATSU为客户提供EFA失效分析领域的缺陷定位解决方案，开发的微光显微镜是业界主流的高分辨率热点定位设备，且拥有多项专利产品。设备具备Thermal，EMMI，OBIRCH等分析功能方法。
