Emission Microscope PHEMOS Series

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PHEMOS-1000

PHEMOS-1000

PHEMOS-1000 

The PHEMOS-1000 is a high-resolution emission microscope that pinpoints failure locations in semiconductor devices by detecting the weak light emissions and heat emissions caused by semiconductor device defects. Since the PHEMOS-1000 is usable in combination with a general-purpose prober, you can do various analysis tasks by using the sample setups you are already familiar with. Installing an optional laser scan system allows acquiring high-resolution pattern images. Different types of detectors are available for various analysis techniques such as emission analysis, thermal analysis, and IR-OBIRCH analysis. The PHEMOS-1000 supports a wide variety of tasks and applications ranging from prober socket boards to a large-size 300 mm wafer prober.

Features

  • Two ultra-high sensitivity cameras mountable
  • Lasers for up to 3 wavelengths and a probe light source for EOP are mountable
  • Equipped with optical stage suitable for diverse samples

Options

  • Includes laser scan system
  • Emission analysis with high-sensitivity near-infrared camera
  • Thermal analysis with high-sensitivity mid-infrared camera
  • IR-OBIRCH analysis
  • Dynamic analysis by laser irradiation
  • EO probing analysis
  • High-resolution and high-sensitivity analysis using NanoLens
  • Connects to CAD Navigation
  • Connects to LSI tester

Display functions
Superimposed display/contrast enhancement function

The PHEMOS-1000 superimposes the emission image on a high-resolution pattern image to localize defect points quickly. The contrast enhancement function makes an image clearer and more detailed.

Display function

  • Annotations: Comments, arrows, and other indicators can be displayed on an image at any location desired.
  • Scale display: The scale width can be displayed on the image using segments.
  • Grid display: Vertical and horizontal grid lines can be displayed on the image.
  • Thumbnail display: Images can be stored and recalled as thumbnails, and image information such as stage coordinates can be displayed.
  • Split screen display: Pattern images, emission images, superimposed images, and reference images can be displayed in a 4-window screen at once.

Specifications

Dimensions/Weights Main unit: 1340 mm (W)×1200 mm (D)×2110 mm (H), Approx. 1500 kg
Control rack: 880 mm (W)×820 mm (D)×1542 mm (H), Approx. 150 kg
Operation desk: 1000 mm (W)×800 mm (D)×700 mm (H), Approx. 45 kg
Line voltage AC200 V (50 Hz/60 Hz)
Power consumption Approx. 1400 VA (Max. 3300 VA)
Vacuum Approx. 80 kPa or more
Compressed air 0.5 MPa to 0.7 MPa

* Weight of PHEMOS-1000 main unit includes a prober or equivalent item.


日本滨松光子学株式会社(HAMAMATSU)是全球光子技术、EFA领域的领导企业。自1953年成立以来,EFA失效分析产品销往全球半导体各大企业,拥有数量最多的半导体和面板行业客户。HAMAMATSU为客户提供EFA失效分析领域的缺陷定位解决方案,开发的微光显微镜是业界主流的高分辨率热点定位设备,且拥有多项专利产品。设备具备Thermal,EMMI,OBIRCH等分析功能方法。